There are several aspects of mass flow controllers that we should pay attention to

Mass flow controller is a relatively common measuring instrument, which has a wide range of applications and is used in many fields. The mass flow controller is different from some other flowmeters. It can not only measure the gas flow, but also control the entire field. Its technology is very advanced and has been well received by users. The mass flow controller adopts a dot-matrix liquid crystal display with backlight and wide temperature. All the displays are in Chinese. It has many functions and is practical. It is especially convenient for users to operate and reduce unnecessary troubles and mistakes. The mass flow controller does not need to be preheated and starts instantly, so that the mass flow controller can start to control the flow of the vacuum coating process system in just one second, real-time measurement and display of mass flow, volume flow, pressure and temperature parameters, and The flow parameters will be fully complemented by temperature and pressure. The gas module program is directly displayed on the screen of the mass flow controller, and the gas type can be switched directly through the screen button operation. When using mass flow controllers for operations, combined with our mass flow controller experience and test conditions, there are several aspects that we should pay attention to: When the working conditions of the instrument change, the zero position of the instrument should be readjusted . At the same time, the conduit of the instrument must be installed horizontally and calibrated with a level. Otherwise, the influence of the change of working conditions on the zero drift will be increased. The frame should not vibrate or sway, so it is not suitable for use on ships. A large number of test data within the flow range are correlated, and the linear regression equation is calculated using the principle of the least square method. The correlation coefficientλThe values ​​are all in the range of 0.999 to 0.9999, which proves that the instrument has good linearity. However, there is a difference between linearity and range, the greater the flow rate, the more serious the nonlinearity, so the range is generally limited to 0-4 standard liters per hour to ensure good linearity. In order to measure a large flow rate while ensuring linearity, the mass flow controller can use the shunt principle to expand the measuring range of the instrument. If the bypass tube, Venturi tube, orifice plate are used together, the measuring range can be expanded to tens, hundreds, thousands of standard liters per hour, up to tens of thousands of standard cubic meters. Although the specific heat of a real gas varies with the pressure, and even some gases have relatively large fluctuations, the measurement accuracy of the mass flow controller can still be maintained within a certain range. In the selection of conduit material, in addition to considering corrosion resistance, it is better to choose materials with better thermal conductivity. As mass flow controllers and other instruments must work normally when the specific heat of the gas is relatively stable, the specific heat value is very low when the gas composition is unstable, there is fog in the center of the gas, and the working conditions are close to the critical area of ​​liquefaction of the gas. Unstable, should not use this instrument. If a gas medium is changed, it is best to re-calibrate. In the mass flow controller manual, it is often introduced that no recalibration is required, but only the specific heat of the two gases is used to convert the uncalibrated gas flow rate. Although it is simple and convenient, it will cause large errors, especially when working under high pressure. , we found that the sensitivity of the mass flow controller is not necessarily proportional to the specific heat, and it should be re-calibrated.

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