Why does the mass flow controller need to meet a differential pressure?

Gas mass flow units are generally expressed in sccm (StandardbicCentimeterperMinute, standard milliliters per minute) and slm (StandardLiterperMinute, standard liters per minute). This means that under different conditions of use, the flow indicated by this instrument is the flow under the standard state. The standard state is defined as: barometric pressure—101325Pa (760mmHg); temperature—0°C (273.15K). This is an important difference between this instrument and other flowmeters, and it is also where sccm﹑slm differs from mL/min﹑L/min. For most users, the expression method of volume flow is very customary and easy to use, but some users need to know the mass (such as g/min) of the medium flowing through the unit time, and this requirement is easy to achieve. Because the gas density in the standard state is a constant, it can be easily found, so simply do a multiplication (multiply the density by several slm) to achieve. Therefore, the volume flow rate under standard conditions is equivalent to the mass flow rate. It should be noted that the sccm/slm mass flow unit commonly used by mass flow controller manufacturers does not conform to the international unit of mass flow (Kg/min) commonly used in domestic measurement standards, but it conforms to the international semiconductor association. SEMI international standard. Why does the mass flow controller need to meet a pressure difference? Many customers find that the flow control effect cannot be achieved well in the process of using the mass flow controller (MFC). In general, the pressure difference of MFC is 50-300Kpa, which means that the pressure difference between the inlet and outlet should not be less than 50Kpa, and the maximum should not exceed 300Kpa, because the MFC has its own electromagnetic proportional valve. If the pressure difference is too small, the gas pressure will drop. The proportional valve cannot be pushed open at all, and the proportional valve cannot be well controlled if the gas pressure is too high. Therefore, customers should first inform the inlet and outlet pressures during use to see if they can meet the differential pressure of 50-300Kpa. Of course, some customers have the demand for low differential pressure.

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