Working principle characteristics of gas mass flow meter controller

Flow meters can be used to control various clean and dry gases, including corrosive gases and special gases, but for the use of corrosive gases and special gases, proper selection of models and sealing materials is required. When ordering, the user needs to give special instructions to the supplier to use the gas, so as to avoid serious losses due to wrong selection or sealing material selection. Usually, the material of the mass flow controller in contact with the working gas is 316L stainless steel, and the sealing material is divided into metal welding, polytetrafluoroethylene and ordinary fluororubber. The MFC with metal welding seal can be used for any gas in principle, including various corrosive gases and special gases. For strong corrosive gases such as boron tribromide, boron trichloride, and hydrogen fluoride, and metal oxide gases used in MOCVD, it is recommended to use a metal-welded sealed MFC. The mass flow controller is composed of a flow sensor, a flow divider channel, a flow regulating valve and an amplification controller. The mass flow controller sensor uses the principle of capillary heat transfer thermoelectric calorimetry to measure the mass flow of gas (without temperature and pressure compensation). The flow signal measured by the sensor heating bridge is sent to the amplifier for amplification, and the amplified flow detection voltage is compared with the set voltage, and then the difference signal is amplified to control and adjust the valve, and the flow through the channel is closed-loop controlled to make it equal to the set voltage. The set flow rates are equal. The flow divider determines the flow in the main channel. The flow display instrument matched with the mass flow controller is equipped with a stabilized power supply, a digital voltmeter, a setting potentiometer, peripheral equipment, internal equipment conversion, and a three-position valve control switch. The gas mass flowmeter controller is a kind of convenient and accurate monitoring of various gases flowing in the pipeline without temperature and pressure compensation. The thermal gas mass flowmeter is a new type of flow measurement and monitoring instrument. The gas mass flowmeter adopts the principle of thermal diffusion, and thermal diffusion technology is a technology with excellent performance and high reliability under harsh conditions. Its typical sensing elements include two thermal resistances (platinum RTDs), one is a speed sensor and the other is a temperature sensor that automatically compensates for changes in gas temperature. When two RTDs are placed in a medium, where the speed sensor is heated to a constant temperature above ambient temperature, the other temperature sensor is used to sense the medium temperature. The gas mass flow through the velocity sensor is calculated from the amount of heat transfer through the sensing element. As the gas flow rate increases, the heat taken away by the medium increases. The temperature of the sensor is lowered accordingly. In order to keep the temperature constant, it is necessary to increase the operating current through the mass flow controller, and the increased part of the current is proportional to the flow rate of the medium.

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