Gas mass flow controller application parameters

D07-9E gas mass flow controller Application: Mass flow controller (MFC) is used to precisely measure and control the mass flow of gas. Widely used in electronic process equipment, vacuum coating, petrochemical, metallurgy, pharmaceutical, optical fiber melting, analysis and measuring instruments, gas production and distribution and other industries. D07-9E Gas Mass Flow Controller Technical Parameters: Product Model D07-9E Product Type Common Type Flow Range 20slm, 30slm, 50slm, 100slm, 150slm, 200slm, 250slm Product Accuracy±2% F.S. Repeatability±0.2% FS linear±1% F.S. response time≤4sec working temperature range (5~45)°C Pressure 3MPa Sealing material Fluorine rubber Viton, neoprene (ammonia resistant rubber) Neoprene Input and output signal (0~5)VDC power supply±15V Valve Type Normally Closed Temperature Coefficient - None - Zero Shift Index - None - Electrical Connection D sub 15 pins Male Working Pressure Differential Range (0.05～0.30) MPa（20slm≤F.S.≤30slm), (0.10～0.30) MPa (50slm m≤F.S.≤150slm), (0.15～0.30) MPa (200slm≤F.S.≤250slm) Leak rate 1×10-8atm•cc/sec He (1×10-9Pa•m3 / sec He) Standard Connector Form VCR1/2”,Double Card Set 1/2”,Double Card Set 1/4”(full range≤60slm), double card setsΦ12, double card setΦ6 (full scale≤60slm), double card setsΦ8 (full scale≤200slm), double card setsΦ10 Surface Chemical Composition - None - Surface Roughness - None - Electromagnetic Interference Resistance - None - Weight 2.6Kg