Abstract: The principle of mass flow meter (MFC) and how to choose and use the information are provided by excellent flow meter and flow meter production and quotation manufacturers. In vacuum coating applications, some gases are used to assist in the realization of the process we want, but how to control the flow and how to control it? That's what we're going to tell you. First of all, what is a mass flow meter (MFC)? Mass flow meter, that is, Mass Flow Meter (shrink. More flow meter manufacturers choose models and price quotations. You are welcome to inquire. The following is the principle of mass flow meter (MFC) and how to choose it. Use the article details. In the vacuum coating application, some gases are used to assist in the realization of the process we want, but the size of the flow and how to control it? This is what we want to tell you. First of all, what is a mass flow meter (MFC)? Mass flow meter, that is, Mass Flow Meter (abbreviated as MFM), is a kind of instrument that accurately measures gas flow, and its measurement value is not out of alignment due to fluctuations in temperature or pressure, and does not require temperature and pressure compensation. Mass flow controller, namely Mass Flow Controller (abbreviated as MFC), not only has the function of mass flowmeter
, but more importantly, it can automatically control the gas flow, that is, users can set the flow according to their needs, and MFC automatically keeps the flow constant at the set value. , even if the system pressure fluctuates or the ambient temperature changes, it will not make it deviate from the set value. Simply put, the mass flow controller is a steady flow device, which is a gas that can be manually set or automatically controlled by a computer connection. Steady flow device. What are the main advantages of mass flow meter
s/mass flow controllers? (1) The measurement and control of flow is not inaccurate due to fluctuations in temperature or pressure. For most flow measurement and control systems, it is difficult to avoid systematic Pressure fluctuations and temperature changes of the environment and medium. For ordinary flowmeters, pressure and temperature fluctuations will cause large errors; for mass flowmeters/mass flow controllers, they can generally be ignored. (2) Measurement control The automatic mass flow meter/mass flow controller can output the flow measurement value as a standard electrical signal output. It is easy to realize the digital display of the flow, the automatic measurement of the cumulative flow, the automatic data recording, the computer management, etc. For the mass flow controller, the It can also realize automatic flow control. Usually, the analog MFC/MFM input and output signals are 0~+5V or 4~20mA, and the digital MFC/MFM is also equipped with RS232 or RS485 digital serial communication port, which can be very convenient. It is connected to the computer for automatic control. (3) Precise quantitative control of the flow The mass flow controller can accurately control the given amount of gas, which is particularly useful for the flow control of many technological processes and the proportional control of different gases. ( 4) Wide application range and wide working pressure range, our products can range from vacuum to 10MPa; can be applied to a variety of gaseous media (including some corrosive gases, such as HCL); have a wide flow range, our The minimum flow range of the product can reach 0 to 5 sccm, and the maximum flow range can reach 0 to 200 slm. The resolution of the flow display can reach 0.1% of the full scale, and the flow control range is 2 to 100% of the full scale (the turndown ratio is - - 50:1), so it is widely used in many fields. What is the concept of the working pressure differential range of the mass flow controller? A gas flow regulating valve is set in the mass flow controller (MFC), which can adjust the flow through the controller from zero to the full scale of the measurement. During the working process There is an air pressure drop between the inlet and outlet of the controller, that is, the differential pressure. The working pressure difference range of MFC is usually 0.1 ~ 0.3MPa. If the pressure difference is lower than the minimum value (0.1MPa), it may not be able to control the full scale value; if it is higher than the maximum value (0.3MPa), it may be closed. Not less than 2%F.S. When the user uses the MFC, no matter whether the reaction chamber the user works in is vacuum or high pressure, the pressure difference between the inlet and outlet ends of the MFC should be kept within the required pressure difference range, and the air pressure should be relatively stable. Using volatile liquid evaporation steam, the air pressure is very low, how to customize the low pressure drop product of the mass flow controller? Some users use volatile liquid evaporation steam as the gas source (such as acetone, etc.), the air pressure is very low, and ordinary MFC is used, which cannot be normal Work. At this time, the user needs to make a special statement to the supplier to customize the mass flow controller with low pressure drop. Usually, the MFC with the working pressure difference lower than 0.01MPa can be customized. At this time, the working pressure difference range of the MFC will also become smaller.
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