Shunt flow measurement technology

1. Diverter The diverter mainly includes annular channel, tubular channel, grooved channel and mesh channel diverter. The function of the flow divider is to supply only a certain range of gas to the sensor regardless of the flow rate of the flowmeter. If the amount of gas supplied to the sensor is too small, the signal output of the sensor will be too weak. Although it can be amplified, the noise will also be amplified at the same time, making the flowmeter unable to work. If the air volume to the sensor is too large, the sensor will work in the nonlinear region, and the output of the sensor may exceed its limit, and its work will be in an unstable state. Therefore, the calculation and determination of the number of shunt apertures is crucial. Figure 1 Different shapes of flow splitters 2. Application of flow splitter technology in mass flow controllers Gas Q enters the flow splitter channel of the mass flow controller from the gas inlet. Directly through the flow divider Q2; the other way through the capillary Q1 of the flow sensor, and then the two ways merge and flow out from the outlet. The flow sensor of the mass flow controller measures the gas flow through the capillary, and the obtained flow signal is sent to the amplifier for amplification. Fig. 2 Working principle diagram of flow splitter Fig. 3 Schematic diagram of tube type flow splitter When the gas Q gradually increases from zero, the output signal of the sensor also gradually increases from zero, so that there is a gas flow value corresponding to an output Signal value, so that the relationship diagram between the output signal value and the flow rate can be made, as shown in Figure 4. Figure 4. The design of the flow splitter must not only ensure that it provides an appropriate flow rate for the sensor, but also requires that the gas volume it provides is linear, that is, for a flow splitter with a certain flow range, the split ratio should not change with the flow rate. 3. Advantages of using flow splitter In practical application, the flow sensor remains unchanged, and gas mass flow controllers with various flow specifications can be realized by changing the flow splitter. Flow specifications range from 5 ml/min to 30L/min, and each flow specification has a flow divider corresponding to it. Since the inner diameter and length of the capillary of the flow sensor are known, as long as the length L and inner diameter d of the shunt pipe are determined, the number of shunt pipes required can be calculated. Using such an accurate calculation method, the calculation result of the shunt is obtained, which provides a theoretical basis and guarantee for improving the accuracy of the product. At the same time, the use of a flow splitter in the pipeline can ensure that the gas in the mass flow controller is in a laminar flow state, and provide a stable gas environment for the measurement of the gas in the capillary of the sensor, thereby improving the measurement and control accuracy of the product.

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