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mass flow meter controller

mass flow meter controller
Mass Flow Meter Controller
L/C, T/T
Place of Origin

MOQ: 1

Payment: TT,VISA,Western Union,MasterCard,

Delivery time: 5-15 days

Start Port: Beijing

Certification: N/A

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What is a Mass Flow Controller? A coriolis mass flow controller automatically controls the flow rate of a gas according to a set flow rate sent as an electric signal, without being affected by use conditions or changes in gas pressure. Flow rates can be roughly classified into two types: volumetric flow and mass flow.Thermal MFCs are both accurate and repeatable, precisely controlling gas flows between 2 and 100% of their Full Scale reading with a resolution of 0.1%.

Features of mass flow meter controller:

Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature.

Two programmable mass flow rate totalizers.

High, Low or In Range Alarms with preset action delay for Mass Flow, Temperature and Pressure.

Multi-Gas functionality: support for 90 different gases and gas mixes.

“User Defined Mixture” functionality allows to create and store up 20 custom gas mixes with up to 5 different gases each.

User programmable mass flow rate Pulse Output

All 3 user selectable analog input and output interfaces are standard: 0-5Vdc, 0-10Vdc, 4-20mA.

Two user selectable digital communication interfaces are standard.

Optional Modbus RTU network interface with isolated RS485 transceiver.

User programmable solid state relay with latch option.

Universal 12-26 Vdc power supply input.

Free, easy-to-use configuration and calibration software 

Programmable set point table with ramping up/down capability up to 16 steps.

What are the main components of mass flow controller?

All mass flow controllers have several common components—an inlet port, an outlet port, a mass flow sensor, a proportional control valve, and a closed loop control system.

How does a mass flow controller work?

A thermal mass flow controller is a compact device that precisely dispenses gaseous or liquid chemicals into a process. Flow rate can be set electronically by a voltage, current or digital (fieldbus) source, and measured by an internal sensor. When the measurement value matches the setpoint value, the control valve adjusts to allow the correct amount of substance to pass through by modulating the size of its passage.

This system consists of a mass flow meter (the sensor) combined with a control valve and feedback electronics between the sensor and the valve. A PID (proportional-integral-derivative) control function is often included as part of the device electronics, but its characteristics can be adjusted by the user for fast or smooth control.

Why would you control mass flow instead of volume flow?

The main variable in many research and production processes is mass, not volume. Coriolis flow controller are able to control mass flow directly. A gas or liquid's mass is an independent value economically, regardless of the operating temperature or pressure. In this way, mass flow devices are not affected by fluctuations in incoming flow pressure and temperature.

To meet users' preferences for expressing compressible gas flow as volume flow anyway, conditions are agreed upon under which mass flow is converted into volume flow. In the unit of volume used, the subscript "n" indicates a temperature of 0 °C and a pressure of 1 atm, which are the ‘normal’ reference conditions.

What is the difference between a mass flow controller and a mass flow meter?

The main difference between a Mass Flow Meter (MFM) and a Mass Flow Controller (MFC) is that an MFM simply measures the gas flow passing through the device. It is ostensibly a sensor. However, an MFC not only measures the gas passing through the device but it also controls it.

Technical Data for  G C -Series Mass Flow Controllers

0.5sccm – 6000 slm Full Scale


Standard Specifications (Contact  for available options.)



GC -Series Mass Flow Controller

Accuracy at calibration conditions after tare

± 1% of Full Scale

High Accuracy at calibration conditions after tare

±0.5% of Full Scale

High Accuracy option not available for units ranged under 5 sccm or over 3000 slm


± 0.2% Full Scale

Zero Shift and Span Shift

0.2% Full Scale / ºCelsius / Atm

Operating Range / Turndown Ratio

2% to 100% Full Scale / 50:1 (100:1 optional)

Maximum Controllable Flow Rate

100% Full Scale

Maximum Measurable Flow Rate

100% Full Scale

Typical Response Time

<1000 ms

Leakage Rate

1×10-9  atm ·cc/s He


Operating Conditions

GC -Series  Mass Flow Controller

Mass Reference Conditions (STP)

25ºC & 14.696 psia (standard — others available on request)

Operating Temperature

0 to +50 ºCelsius

Humidity Range (Non–Condensing)

0 to 90%

Maximum Internal Pressure (Static)

145 psi(g)/10bar(g) optional:Max.435psi(g)/30bar(g)

Pressure Differential (Inlet to Outlet)

Under 500slm:72.5psi(d)/5bar(d); Above 500slm:145psi(d)/10bar(d)

Mounting Attitude Sensitivity

Full Scale:None

Valve Type

Normally Closed

Ingress Protection




Wetted Materials

316L 417J1 Stainless Steel, Viton, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene

Sulfide, Heat Cured Epoxy, Aluminum, Gold, Brass,  Silicon, Glass.

If your application demands a different material, please contact   .


Communications / Power

GC-Series  Mass Flow Controller

Monochrome LCD or color TFT display Integrated multifunction button

Display Mass Flow, Cumulative Flow, conversion gas coefficient and other functions

Digital Communications Options1

RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet /


Analog Signal2 Options

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

Optional Secondary Output Signal2

0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA

Electrical Connection Options

9-pin D-sub (DB9) / 15-pin D-sub (DB15) / RJ11

Supply Voltage

24 Vdc / ±15Vdc

Supply Current

under 500slm : 0.50 Amp; above

500slm1 .0Amp

1. The Digital Output Signal communicates Mass Flow, Cumulative Flow.

2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow, Cumulative Flow.



GC-Series  Mass Flow Controller



Gas conversion  coefficient V2.0

Gas conversion coefficient provides 60 Preloaded Gas Calibrations: See the following page for a complete list.

If your application calls for a gas not on this list, please let us know. We can also calibrate to a wide variety of complex gas mixtures.



Range Specific Specifications


Full Scale Flow Mass Controller 1

Mechanical Dimensions 2

Process Connections3

GC-series  0.5-10 sccm


GC-Standard series and Digital series 4.72”H x 3.15”W x 1.22”D


GC-Intelligent series 4.92”H x 3.94”W x 1.14”D



G1/4” Female Thread




G3/8” Female Thread

GC-series  10-100 sccm

GC-series  100-500 scmm

GC-series  500-1000 sccm

GC-series  1000-2000 sccm

GC-series 2-5 slm

GC-series  5-20 slm

GC-series  20-30 slm

GC-series  30-100 slm


5.31”H x 4.53”W x 1.38”D


G3/8”  Female Thread

GC-series  100-200 slm

GC-series  200-300 slm

GC-series  300-500 slm


6.30”H x 9.25”W x 2.91”D


G1/2”  Female Thread

GC-series  500-1000 slm

GC-series  1000-2000 slm

GC-series  2000-3000 slm

GC-series  3000-6000 slm

6.30”H x 9.25”W x 2.91”Dx2

Double G1/2”Female Thread

1. Lower Pressure Drops Available mass flow controllers please contact   .

2. See drawings for metric equvalents.

3. Compatible with tube, face seal, push connect and compression adapter fittings. VCR and SAE connections upon request.

GC- Standard series and Digital series





GC- Intelligent series

0.5sccm- 30slm


GC- Standard series and Digital series



GC-Intelligent series





GC- Digital series 300slm-3000slm



GC- Intelligent series



Appendix: Gas conversion  coefficient V2.0



*For more single gas coefficients or mixed gas coefficients, please provide the specific heat and density of the gas medium and contact  for calculation.

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