Mass flow controllers can be used to control all kinds of gases, including corrosive gases and special gases, but it should be noted that for the use of corrosive gases and special gases, proper selection of models and sealing materials is required. When ordering, the user needs to make a special statement to the supplier to use the gas, so as to avoid serious losses due to wrong selection or sealing material selection. Usually, the wet material of the mass flow controller in contact with the working gas is 316L stainless steel, polytetrafluoroethylene and sealing materials, etc., and the sealing materials are divided into two categories: metal seals and rubber seals. Metal seal materials are generally corrosion-resistant materials such as stainless steel, gold or nickel. The MFC with metal seal can be used for any gas in principle, including various corrosive gases and special gases. For strong corrosive gases such as boron tribromide, boron trichloride, hydrogen fluoride and metal oxide gases used, metal-sealed MFC is recommended. The mass flow controller is composed of a flow sensor, a flow divider channel, a flow regulating valve and an amplification controller. The mass flow controller sensor uses the principle of capillary heat transfer thermoelectric calorimetry to measure the mass flow of gas (without temperature and pressure compensation). The flow signal measured by the sensor heating bridge is sent to the amplifier for amplification, and the amplified flow detection voltage is compared with the set voltage, and then the difference signal is amplified to control and adjust the valve, and the flow through the channel is closed-loop controlled to make it equal to the set voltage. The set flow rates are equal. The flow divider determines the flow in the main channel. The flow display instrument matched with the mass flow controller is equipped with a stabilized power supply, a digital voltmeter, a setting potentiometer, peripheral equipment, internal equipment conversion, and a three-position valve control switch. The mass flow controller generally refers to the self-control flow control valve, which is an intuitive and simple flow adjustment control device. The application of the self-control flow control valve in the pipeline network can directly set the flow according to the design. The valve can be automatically eliminated under the action of water. The residual pressure head of the pipeline and the flow deviation caused by pressure fluctuations will keep the set flow constant no matter how the system pressure changes. These functions of the mass flow controller and the valve make the flow adjustment of the pipeline network complete at one time, and the network adjustment work becomes simple. The flow distribution can effectively solve the hydraulic imbalance of the pipe network. The mass flow controller is a new type of flow measurement that can conveniently and accurately monitor the mass flow of air, nitrogen, hydrogen, oxygen, natural gas, flue gas, biogas and other gases flowing in the pipeline without temperature and pressure compensation. , Monitoring instruments. Due to the variety and flexibility of the structure of the mass flow controller, it can meet the different needs of the use site. It makes the most difficult flow measurement of large pipe diameter and low flow rate easy. If it is equipped with a continuous flow assembly and disassembly device, the user can easily and safely assemble and disassemble the mass flow controller under the condition of non-stop gas flow, so the maintenance of the mass flow controller or the cleaning of the sensing probe becomes easy up. The mass flow controller adopts the principle of thermal diffusion, and thermal diffusion technology is a technology with excellent performance and high reliability under harsh conditions. Its typical sensing elements include two thermal resistances (platinum RTDs), one is a speed sensor and the other is a temperature sensor that automatically compensates for changes in gas temperature. When two RTDs are placed in a medium, where the speed sensor is heated to a constant temperature above ambient temperature, the other temperature sensor is used to sense the medium temperature. The gas mass flow through the velocity sensor is calculated from the amount of heat transfer through the sensing element. As the gas flow rate increases, the heat taken away by the medium increases. The temperature of the sensor is lowered accordingly. In order to keep the temperature constant, it is necessary to increase the operating current through the mass flow controller, and the increased part of the current is proportional to the flow rate of the medium. The mass flow controller is an instrument that uses the principle of heat conduction to measure fluid flow. The mass flow controller uses the constant temperature difference method to accurately measure the gas mass flow. The mass flow controller has the advantages of small size, high degree of digitization, convenient installation, and accurate measurement. The mass flow controller can be used in the mass flow or actual working conditions of air, hydrocarbon gas, flammable gas, flue gas and other gases in petroleum, chemical, electric power, light industry, food, textile, medicine, electronics and environmental protection and other industrial sectors Volumetric flow measurement and monitoring.
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