1. Background Electromagnetic valve (Electromagnetic valve) is an industrial equipment controlled by electromagnetic, which is used in industrial control system to adjust the direction, flow, speed and other parameters of the medium. As the actuator of fluid control automation system, it has become the first choice product for fluid control automation due to its characteristics of simplicity, fast action and easy maintenance. 2. Principle of electromagnetic regulating valve Electromagnetic regulating valve is composed of electromagnetic coil and magnetic core, and is a valve body containing one or several holes. When the coil is energized or disconnected, the operation of the magnetic core will cause the fluid to pass through the valve body or be cut off, so as to achieve the purpose of changing the direction of the fluid. When energized, the electromagnetic coil generates electromagnetic force to lift the closing member from the valve seat, and the valve opens; when the power is turned off, the electromagnetic force disappears, and the spring presses the closing member on the valve seat, and the valve closes. The figure below is a schematic diagram of the gas flow in the two states of the electromagnetic control valve, energized and de-energized. Figure 1. Schematic diagram of the operation of the electromagnetic control valve in the power-off state 3. The application of the electromagnetic control valve in the gas mass flow controller. Flow control has large-scale applications in many industries. How to accurately control the gas flow is a product research and development issue. Core Technology. The electromagnetic control valve controls the opening of the valve port by controlling the input voltage, so as to realize the control of the flow rate. When the electromagnetic regulating valve is used to control the flow, it is easy to realize the automation of flow control, so it is widely used in mass flow controllers. The working principle of the electromagnetic regulating valve on the flow controller is shown in Figure 2. Figure 2 Schematic diagram of the flow controller The actual flow through the valve port can be measured by the flow sensor, and the flow signal output by the flow sensor can be displayed on the display after being amplified by the amplifier. When selecting the working state of the valve control, input the set value of the flow rate. After comparing the value with the amplified signal output by the flow sensor, after PID operation, input a suitable voltage to the electromagnetic control valve to open the valve port to a suitable amount. , so that the flow through the valve port is consistent with the set flow value. Only by reasonably selecting the structural parameters of the electromagnetic regulating valve can the three working states required by the flow controller for the electromagnetic regulating valve be satisfied: valve fully open, valve closed, and valve controlled. The electromagnetic regulating valve is applied to the flow controller, and its structure is shown in Figure 3. Figure 3 flow controller 4. Advantages of high-precision electromagnetic regulating valve Ordinary solenoid valve has only two working states: fully open and closed, while the electromagnetic regulating valve on the flow controller requires three working states: valve fully open and valve closed , Valve control. The so-called full opening of the valve is the maximum opening of the valve; the closing of the valve is the ability to close the valve port under the allowable working pressure; * Exact control. The schematic diagram of the structure of the electromagnetic control valve is shown in Figure 4. Figure 4 Schematic diagram of the structure of the electromagnetic control valve The electromagnetic control valve is mainly composed of a wire package, a valve core, an elastic piece and a valve port gasket. The working principle of the high-precision electromagnetic control valve is: when the electromagnetic control valve has no voltage input, the state of the electromagnetic control valve is shown in figure (a) in Figure 4; when the voltage V is input to the electromagnetic control valve, the valve core is in Under the action of electromagnetic suction, after moving upwards for a certain displacement y, it is in a static state of force balance, as shown in figure (b) in Figure 4; with the increase of the input voltage V of the electromagnetic regulating valve, the valve core moves upwards The displacement y will also increase. In this way, the precision control of gas flow is realized. Compared with ordinary solenoid valves, the solenoid regulating valves used by mass flow controllers have a designed valve control mode that can achieve high-precision gas control. At the same time, as the semiconductor industry gradually develops into the 28-technology era, the accuracy requirements for mass flow controllers are getting higher and higher, and high-precision electromagnetic control valves are the core components that affect the accuracy of flow controllers. Therefore, high-precision electromagnetic control valves The research and development of the technology is the need of the development of science and technology, and the need of the market. 5. Industrial application of high-precision electromagnetic control valve technology Electromagnetic control valve can be widely used in the field of flow control due to its simple structure and wide control range. Compared with other control technologies, it has high technical reliability and low cost. All kinds of media have good adaptability, and are well applied in many industries such as photovoltaic solar energy and fuel cells.
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